SPT offers a range of large batch vertical furnaces. We are able to offer both new and factory-certified re-manufactured systems as well as custom system conversions to meet specific engineering requirements. The production-proven vertical furnaces deliver superior process results, high productivity and the lowest cost of ownership (CoO).

AVP/RVP for 100 to 200 mm wafers

RVP-300 for 200/300 mm wafers

Our diverse process portfolio includes:

Wet/dry thermal oxide

Radical oxidation

Stoichiometric and stress controlled SiN

TEOS, SiH4 and DCS-based SiO2

Doped and un-doped polysilicon

100 to >1200°C anneals